Image sensing apparatus

ABSTRACT

An image sensing apparatus is provided, which is provided with a plurality of image sensing elements each including a plurality of photoelectric conversion sections and an adding circuit adapted to add signals from the plurality of photoelectric conversion sections to obtain a one-pixel signal, wherein the adding circuit adds the signals such that the one-pixel signals obtained by the addition are arranged at equal intervals in an area extending over the plurality of image sensing elements.

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to an image sensing apparatus forsensing an object image.

[0003] 2. Related Background Art

[0004] Digitalization has advanced in various medical fields. Atwo-dimensional image sensing apparatus has been developed fordigitization of images in the field of the X-ray diagnosis as well. Alarge image sensing apparatus with a maximum length of 43 cm has beenmanufactured for sensing breasts and chests.

[0005] One conventional art will be described.

[0006] A large X-ray image sensing apparatus is realized by tessellatingfour sensor panels, which use amorphous silicon semiconductors on aglass substrate whose size can easily be enlarged. A technology forenlarging a size of an amorphous silicon semiconductor apparatus(technology for forming a large substrate and an element thereon, or thelike) which has already been established in the field of LCDs is used.As an example of this type of technology, there is one described in U.S.Pat. No. 5,315,101. A large area active array matrix described in thepatent is shown in FIG. 1. Referring to FIG. 1, reference numeral 1901denotes substrates, 1902 denotes pixels, 1903 denotes connection leadand 1904 denotes common terminals.

[0007] Another conventional art will be described next.

[0008] There is a technology for manufacturing a large X-ray imagesensing apparatus using a plurality of monocrystal image sensing element(silicon or the like). As an example of this type of technology, thereare ones described in U.S. Pat. Nos. 4,323,925 and 6,005,911. As amonocrystal image sensing element, there are a CCD image sensingelement, an MOS type or a CMOS type image sensing element or the like. Asingle image sensing element has a sufficient capability to handle anX-ray motion image.

[0009] An image sensor described in U.S. Pat. No. 4,323,925 is shown inFIG. 2. Referring to FIG. 2, reference numeral 2001 denotes an object,2002 denotes a lens, 2003 denotes an image of the subject, 2004 denotesa surface, 2005 denotes continuous optical sub-images, 2006 denotestaper-shaped FOPs (fiber optic plates), 2007 denotes image inputsurfaces, 2008 denotes image senor modules, 2009 denotes non-imageforming peripheral areas and 2010 denotes leads. Since the opticalsub-images 2005 are reduced in size by the taper-shaped FOP 2006 to beincident on the image input surfaces 2007, the non-image sensingperipheral areas 2009 are provided, to which the leads are connected.

[0010] However, the former conventional art has the following problems.

[0011] In order to form one image, only 4 pieces (2×2) sensor panels canbe used at the most. This is because the image sensor has aconfiguration in which external terminals are provided in the externalcircumference of the sensor panels and a circuit for driving the sensorpanels are externally connected thereto.

[0012] In addition, a size of a signal processing circuit that can bemounted on an image sensing element is limited to a such degree that theelement can only have a pixel selection switch at the most. The signalprocessing circuit (a driver, an amplifier or the like) is externallyattached.

[0013] Moreover, since an amorphous silicon does not have a goodsemiconductor property with respect to a high-speed operation, it isdifficult to manufacture a large image forming apparatus for handlingmoving images. In addition, since an amorphous silicon image formingelement has lower sensitivity compared with a monocrystal silicon imageforming element, it is difficult to make it able to handle X-ray movingimages that require high sensitivity.

[0014] In addition, the latter conventional art has the followingproblems.

[0015] Since the size of individual image forming element is small (inthe present technology, the size of 8 inches is the largest for awafer), 2'2 or more pieces of sensor panels are required.

[0016] In addition, a dead space is always formed in a part for joiningeach image sensing element in a configuration of a simple large imagesensing apparatus that uses multiple monocrystal image sensing elements(areas for providing peripheral circuits such as a shift register and anamplifier, external terminals for exchanging signals and power with theoutside and a protective circuit are always necessary in addition topixel areas). This part of the dead space becomes a line defect, whichlowers the image quality. Thus, light from a scintillator is guided tothe image sensing elements while avoiding the dead space usingtaper-shaped FOPs (fiber optic plates). However, this requires extraFOPs and increases manufacturing costs. In particular, the taper-shapedFOPs are very costly.

[0017] Moreover, in the taper-shaped FOPs, the light from thescintillator tends not to be incident on the FOPs depending on a taperangle, which causes the decrease of an output light amount to offsetsensitivity of the image sensing elements and lower the overallsensitivity of the apparatus.

SUMMARY OF THE INVENTION

[0018] It is an object of the present invention to realize a highquality image when an object image is sensed over a plurality of sensingareas.

[0019] In order to attain the above-mentioned object, according to oneaspect of the present invention, there is provided an image sensingapparatus for sensing an image by arranging a plurality of image sensingelements each including a plurality of photoelectric conversionsections, comprising an adding circuit adapted to add signals from theplurality of photoelectric conversion sections to obtain a one-pixelsignal, wherien the adding circuit adds the signals such that theone-pixel signals obtained by the addition are arranged at equalintervals in an area extending over the plurality of image sensingelements.

[0020] In addition, according to another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing elements each includinga plurality of photoelectric conversion sections, comprising an addingcircuit adapted to add signals from the plurality of photoelectricconversion sections to obtain a one-pixel signal, wherein eachphotoelectric conversion section is arranged such that the one-pixelsignals obtained by the addition is arranged at equal intervals in anarea extending over the plurality of image sensing elements.

[0021] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus including aplurality of image sensing areas each including a plurality ofphotoelectric conversion sections, and a plurality of output sectionsfor outputting a signal on an each image sensing area basis, for sensingan image extending over the plurality of image sensing areas, comprisingan image processing circuit adapted to perform a processing so as toobtain an image from a first one-pixel signal obtained by adding signalsfrom the plurality of photoelectric conversion sections extending overthe plurality of image sensing areas and a second one-pixel signalobtained from each photoelectric conversion section.

[0022] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus which includes aplurality of image sensing areas each including a plurality ofphotoelectric conversion sections, and a plurality of output sectionsfor outputting a signal for each image sensing area, for sensing animage extending over the plurality of image sensing areas, comprising anadding circuit adapted to, when signals from the plurality ofphotoelectric conversion sections are added to obtain a one-pixelsignal, add the signals from the plurality of photoelectric conversionsections extending over the plurality of image sensing areas to obtainthe one-pixel signal.

[0023] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas, wherein eachimage sensing area is provided with a plurality of photoelectricconverting elements and each photoelectric converting element isprovided with a photoelectric conversion section; and wherein scanningcircuits are arranged inside the photoelectric conversion sections ofparts of the photoelectric converting elements and centroids of thephotoelectric conversion sections in which the scanning circuits arearranged and centroids of the photoelectric conversion sections in whichthe scanning circuits are not arranged are arranged at equal intervals.

[0024] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas including aplurality of photoelectric conversion sections, wherein each of theplurality of image sensing areas includes a first area in which scanningcircuits are arranged between photoelectric converting areas and asecond area in which the scanning circuit is not arranged between thephotoelectric converting areas, and wherein centroids of thephotoelectric conversion sections of the first area and centroids of thephotoelectric conversion sections of the second area are arranged atequal intervals.

[0025] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas, wherein eachimage sensing area is provided with a plurality of photoelectricconverting elements and each photoelectric converting element isprovided with a photoelectric conversion section, and wherein commonprocessing circuits for selectively outputting to the outside signalsfrom a vertical output line to which signals from the plurality ofphotoelectric converting elements in the vertical direction are readout, via a horizontal output line are arranged inside the photoelectricconversion sections of parts of the photoelectric converting elements,and centroids of the photoelectric conversion sections in which thecommon processing circuits are arranged and centroids of thephotoelectric conversion sections in which the common processingcircuits are not arranged are arranged at equal intervals.

[0026] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas each including aplurality of photoelectric conversion sections, wherein each of theplurality of image sensing areas includes a first area in which commonprocessing circuits for selectively outputting to the outside signalsfrom a vertical output line to which signals from the plurality ofphotoelectric conversion sections in the vertical direction are readout, via a horizontal output line are arranged between the photoelectricconverting areas, and a second area in which the common circuits are notarranged between the photoelectric converting areas, and whereincentroids of the photoelectric conversion sections of the first area andcentroids of the photoelectric conversion sections of the second areaare arranged at equal intervals.

[0027] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas, wherein eachimage sensing area is provided with a plurality of photoelectricconverting elements and each photoelectric converting element isprovided with photoelectric conversion sections, and wherein lightshielding sections are arranged inside the photoelectric conversionsections of parts of the photoelectric converting elements and centroidsof the photoelectric conversion sections in which the light shieldingsections are arranged and centroids of the photoelectric conversionsections in which the light shielding sections are not arranged arearranged at equal intervals.

[0028] In addition, according to still another aspect of the presentinvention, there is provided an image sensing apparatus for sensing animage by arranging a plurality of image sensing areas, wherein eachimage sensing area is provided with a plurality of photoelectricconverting elements and each photoelectric converting element isprovided with photoelectric conversion sections, and wherein lightshielding sections are arranged inside the photoelectric conversionsections of the plurality of photoelectric converting elements andcentroids of the photoelectric conversion sections in which the lightshielding sections are arranged are arranged at equal intervals.

[0029] Moreover, according to another aspect of the present invention,there is provided an image sensing apparatus for sensing an image byarranging a plurality of image sensing areas each including a pluralityof photoelectric conversion sections, wherein each of the plurality ofimage sensing areas includes a first area in which scanning circuitsand/or common processing circuits for selectively outputting signalsfrom a vertical output line to which signals from the plurality ofphotoelectric conversion sections in the vertical direction are readout, to a horizontal output line are arranged between the photoelectricconverting areas and a second area in which the scanning circuits andthe common circuits are not arranged between the photoelectricconverting areas, and wherein light shielding sections are arranged suchthat centroids of the photoelectric conversion sections of the firstarea and centroids of the photoelectric conversion sections of thesecond area are arranged at equal intervals.

[0030] Other objects, features and advantages of the present inventionwill be apparent from the following description taken in conjunctionwith the accompanying drawings, in which like reference charactersdesignate the same or similar parts throughout the figures thereof.

BRIEF DESCRIPTION OF THE DRAWINGS

[0031]FIG. 1 illustrates an example of a conventional art;

[0032]FIG. 2 illustrates an example of a conventional art;

[0033]FIG. 3 is a plan view of an image sensing apparatus of first totwelfth embodiments;

[0034]FIG. 4 is a sectional view along a line 4-4 in FIG. 3;

[0035]FIG. 5 is a plan view showing an image sensing element accordingto the first to the twelfth embodiments and a wafer forming its base;

[0036]FIG. 6 is a circuit diagram of a one-pixel circuit inside theimage sensing element according to the first to the twelfth embodimentsaccording to the present invention;

[0037]FIG. 7 is a circuit diagram of the image sensing element accordingto the first to the twelfth embodiments of the present invention;

[0038]FIG. 8 is a conceptual plan view showing a configuration of aone-pixel area (cell) according to the first to the fifth embodiments ofthe present invention;

[0039]FIG. 9 is a plan view showing a method of selecting a plural-pixelarea according to the first embodiment of the present invention;

[0040]FIG. 10 is a diagram showing an example of a circuit configurationin the case in which voltages generated in four pixels are addedaccording to an embodiment of the present invention;

[0041]FIG. 11 is a diagram showing another example of a circuitconfiguration in the case in which voltages generated in four pixels areadded according to the embodiment of the present invention;

[0042]FIG. 12 is a plan view showing a method of selecting plural-pixelareas according to the second embodiment of the present invention;

[0043]FIG. 13 is a diagram showing an example of a circuit configurationin the case in which charges generated in four pixels are addedaccording to an embodiment of the present invention;

[0044]FIG. 14 is a plan view showing a layout of a photoelectricconversion section according to the third embodiment of the presentinvention;

[0045]FIG. 15 is a plan view showing a method of selecting plural-pixelareas according to the third embodiment of the present invention;

[0046]FIG. 16 is a plan view showing layouts of photoelectric conversionsections and scanning circuits according to the fourth embodiment of thepresent invention;

[0047]FIG. 17 is a plan view showing layouts of photoelectric conversionsections and scanning circuits according to the fifth embodiment of thepresent invention;

[0048]FIG. 18 is a plan view showing a layout of image sensing elementsproposed by the applicant;

[0049]FIG. 19 is a conceptual plan view showing a configuration of aone-pixel area (cell) according to the sixth to the twelfth embodimentsof the present invention, which shows how elements of a scanning circuitare arranged inside a photoelectric conversion section;

[0050]FIG. 20 is a plan view showing a layout of the image sensingelements according to the first embodiment of the present invention;

[0051]FIG. 21 is a circuit diagram showing a first example of astatic-type shift register;

[0052]FIG. 22 is a circuit diagram showing a second example of thestatic-type shift register;

[0053]FIG. 23 is a circuit diagram showing an example of an invertorused for the shift register;

[0054]FIG. 24 is a circuit diagram showing an example of a clockedinvertor used in the static-type shift register;

[0055]FIG. 25 is a circuit diagram showing an example of a dynamic-typeshift register;

[0056]FIG. 26 is a plan view showing a layout of the image sensingelements according to the seventh embodiment of the present invention;

[0057]FIG. 27 is a plan view showing a layout of the image sensingelements according to the eighth embodiment of the present invention;

[0058]FIG. 28 is a plan view showing a layout of the image sensingelements according to the ninth embodiment;

[0059]FIG. 29 is a plan view showing a layout of the image sensingelements according to the tenth embodiment of the present invention;

[0060]FIG. 30 is a plan view showing a layout of the image sensingelements according to the eleventh embodiment of the present invention;and

[0061]FIG. 31 is a conceptual view showing a configuration of an X-raydiagnosis system according to the twelfth embodiment of the presentinvention.

DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0062] Embodiments of the present invention will be hereinafterdescribed in detail with reference to the drawings.

[0063] First, items common to first to twelfth embodiments will bedescribed.

[0064]FIG. 3 shows an image sensing element portion of a large areaX-ray image sensing apparatus of a 414 mm square that is formed bytessellating nine image sensing elements 101A to 101I of a 138 mmsquare.

[0065]FIG. 4 shows a 4-4 cross section of FIG. 3. A scintillator plate201 consisting of a scintillator such as Gd₂O₂S or CsI using europium,terbium or the like as an inert body is arranged on an FOP (fiber opticplate) 202. X-ray 202 is irradiated on the scintillator and converted tovisible light. This visible light is detected by the image sensingelements 101A to 101I. The scintillator is preferably selected such thatits light emitting wave length conforms to the sensitivity of the imagesensing elements 101A to 101I. Reference numeral 204 denotes an externalprocessing substrate having a circuit that supplies power, clocks or thelike for the image sensing elements 101A to 101I and takes out signalsfrom the image sensing elements to process them. Reference numeral 205denotes TABs (Tape Automated Bonding) for electrically connecting eachof the image sensing elements 101A to 101I and the external processingsubstrate.

[0066] Clocks, power or the like of the image sensing elements 101A to101I are inputted by and a signal from a pixel is outputted to theexternal processing substrate 204 arranged in the back side of the imagesensing elements 101A to 101I, through the TABs 205 connected toelectrode pads provided at an end of the image sensing element.

[0067]FIG. 5 shows the case in which one image sensing element is takenout from an eight-inch wafer 300, which is currently a mainstream wafer.The eight-inch wafer 300 is an N-type wafer. Each of the CMOS type imagesensing elements 101A to 101I of 138 mm square is created using thiseight-inch wafer 300 by a CMOS process .

[0068]FIG. 6 illustrates a configuration of a pixel part forming eachpixel of the CMOS type image sensing elements 101A to 101I. Referencenumeral 401 denotes a photodiode for performing photoelectric conversion(photoelectric conversion section), 402 denotes a floating diffusion foraccumulating charges, 403 denotes a transfer MOS transistor (transferswitch) for transferring charges generated by the photodiode 401 to thefloating diffusion 402, 404 denotes a reset MOS transistor (resetswitch) for discharging the charges accumulated in the floatingdiffusion 402, 405 denotes a row selecting MOS transistor (row selectionswitch) for selecting a row, and 406 denotes an amplification MOStransistor (pixel amplifier) that functions as a source follower.

[0069]FIG. 7 shows a schematic view of an entire circuit with 3×3pixels.

[0070] A gate of the transfer switch 403 is connected to a ΦTX 502coming from a vertical shift register being a type of a verticalscanning circuit, a gate of the reset switch 404 is connected to a ΦRES503 coming from the vertical scanning circuit 501, and a gate of the rowselection switch 405 is connected to a ΦSEL 504 coming from the verticalscanning circuit 501.

[0071] Photoelectric conversion is performed in the photodiode 401.During a period when photo-charge is accumulated, the transfer switch403 is in the off state and the charges photoelectrically converted inthis photodiode are not transferred to the gate of the source follower406 forming a pixel amplifier. The gate of the source follower 406forming the pixel amplifier is turned on by the reset switch 404 beforestarting the accumulation and initialized to an appropriate voltage.This generates a reference signal containing a noise component. When therow selection switch 405 is turned on, a source follower circuitcomposed of a load current source and the pixel amplifier 406 enters anoperation state, and a charge at the time of reset is transferred to thegate of the sour follower 406 forming the pixel amplifier, by turning ontransfer switch 403, whereby this noise signal becomes readable. Then, anoise signal output of a row selected by the row selecting MOS 405 isgenerated on a vertical output line (signal output line) 505 andaccumulated in a not-shown storage element which is not shown. When thereset switch 404 is turned off and the row selection switch 405 isturned on next, the source follower circuit composed of the load currentsource and the pixel amplifier 406 enters an operation state. Then, thecharges accumulated in the photodiode is transferred to the gate of thesource follower 406 forming the pixel amplifier, upon turning on thetransfer switch. At this point, a photodiode accumulation signal outputof the row selected by the row selecting MOS 405 is generated on thevertical output line (signal output line) 505.

[0072] A noise signal is included mixedly in an accumulation signal ofthis photodiode. The noise signal is subtracted from the accumulationsignal in a subtraction circuit (not shown) inside an image sensingelement, to thereby obtain an image sensing signal.

[0073] This output is sequentially read out to an output section 508 viathe horizontal output line by driving a row selection switch(multiplexer) 506 using a horizontal shift register 507 that is a typeof a horizontal scanning circuit.

[0074] Items common to the first to the fifth embodiments will behereinafter described.

[0075]FIG. 8 shows an example of a unit block (a unit for selecting anddriving one row) 601 of the vertical shift register 501, which isarranged on a substrate of an image sensing element. In this example,the unit block 601 of the vertical shift register 501 is arranged with aone-pixel circuit 602 in a one-pixel area (one cell) in FIG. 8. However,this embodiment is not limited to this. The one-pixel circuit 602 is asshown in FIG. 4. The vertical shift register is shown as a simplecircuit that is composed of a static shift register 604 and a transfergate 605 in order to produce a transfer signal ΦTX, a reset signal ΦRES,a row selection signal ΦSEL. These are driven by a signal from a clocksignal line (not shown). A circuit configuration of a shift register isnot limited to this, and an arbitrary circuit configuration can beadopted according to various methods of driving such as pixel additionor read-out with pixel.

[0076] Further, as a scanning circuit, an n to 2^(n) decoder can be usedrather than a shift register. Sequential scanning becomes possible as ina shift register by connecting a counter output that sequentiallyincrements, to an input of the decoder. On the other hand, an image ofarbitrary plural-pixel areas by random scanning can be obtained byinputting an address of a plural-pixel area where an image is desired tobe formed, into the input of the decoder.

[0077]FIG. 9 shows an enlarged view of a position denoted by referencenumeral 10 in FIG. 3 of the image sensing apparatus according to thefirst embodiment.

[0078] Referring to FIG. 9, an image sensing element 101A and an imagesensing element 101B are arranged adjacent to each other. The imagesensing elements 101A and 101B are formed of a plurality ofphotoelectric converting elements, and each photoelectric convertingelement has a photoelectric conversion section. When the image sensingelement 101A and the photoelectric element 101B are arranged side byside, a gap 103 is inevitably generated. However, by adjusting positionsand widths of photoelectric conversion sections 104 of photoelectricconverting elements contacting the gap 103, centroids 106 ofphotoelectric conversion sections 105 of (inside) photoelectricconverting elements not contacting the gap 103 and centroids 107 of thephotoelectric conversion sections 104 of photoelectric convertingelements contacting the gap 103 are arranged at equal intervals over theimage sensing elements 101A and 101B. In this way, distortion of animage can be prevented at a border of the image sensing element 101A andthe image sensing element 101B.

[0079] In addition, in the case in which a one-pixel signal is obtainedby collecting signals obtained from the plurality of photoelectricconverting elements, distortion of an image is also prevented byperforming voltage addition. That is, as shown in FIG. 9, if a pixelsignal for a plural-pixel area 108 is obtained by adding voltagesgenerated in photoelectric conversion sections of four photoelectricconverting elements in the plural-pixel area 108, a position of aone-pixel signal for the plural-pixel area 108 is a position denoted byreference numeral 110 (a position coinciding with an average position ofcentroids of the photoelectric conversion section of the fourphotoelectric converting elements in the plural-pixel area 108). Inaddition, if a one-pixel signal for a plural-pixel area 109 is obtainedby adding voltages generated in photoelectric conversion sections offour photoelectric converting elements in the plural-pixel area 109, aposition of the one-pixel signal for the plural-pixel area 109 is aposition denoted by reference numeral 112 (a position coinciding with anaverage position of centroids of the photoelectric conversion sectionsof the four photoelectric converting elements in the plural-pixel area109). Therefore, the pixel centroids 110 and 112 are arranged at equalintervals.

[0080]FIG. 10 shows an example of a circuit configuration when voltagesin four pixels are added.

[0081] In addition, the voltages of the four pixels may be added afterreading a voltage generated in each pixel from an amplifier 508. Whenreading out a voltage on an each plural-pixel area basis, the voltagesof the four pixels can be added simply by providing latches and addersfor three pixels as shown in FIG. 11. In addition, if a voltage is readon an each row basis, it is sufficient to make the central latch amongthe latches for three pixels function as a (one row-one pixel) memory.Further, the voltages may be read in accordance with a reading addressof a predetermined order and then digitally added after A/D convertingan output of the amplifier 508 and writing it in a memory in accordancewith a predetermined writing address. Procedures after the A/Dconversion can be performed also by an information processing apparatussuch as a personal computer.

[0082] A basic configuration of a second embodiment is the same as thatof the first embodiment.

[0083]FIG. 12 shows an enlarged view of the position denoted byreference numeral 10 in FIG. 3 of an image sensing apparatus accordingto this embodiment.

[0084] In this embodiment, plural-pixel areas for adding pixel signalsare made as denoted by reference numerals 208 and 209. A position of aone-pixel signal for the plural-image area 208 is a position denoted byreference numeral 210 (a position coinciding with an average position ofcentroids of photoelectric conversion sections of four photoelectricconverting elements in the plural-pixel area 208) both in the cases ofcharge addition and voltage addition. A position of a one-pixel signalfor the plural-pixel area 209 is a position denoted by reference numeral211 (a position coinciding with an average position of centroids ofphotoelectric conversion sections of four photoelectric convertingelements in the plural-pixel area 209) both in the cases of chargeaddition and voltage addition.

[0085]FIG. 13 shows a view of a circuit configuration for adding chargesgenerated in four pixels. In this circuit configuration, aftertransferring charges accumulated in a photodiode to a floating diffusionby turning on a transfer switch, the charges are averaged among the fourpixels by turning on switches 701, 702 and 703, and thereafter a rowselection switch is turned on. Thus, pixel centroids 210 and 211 foreach plural-pixel area are arranged at equal intervals regardless ofwhether pixel signals are added by the charge addition or are added bythe voltage addition.

[0086] A basic configuration of a third embodiment is the same as thatof the first embodiment.

[0087]FIG. 14 shows an enlarged view of the position denoted byreference numeral 10 in FIG. 3 of the image sensing apparatus accordingto this embodiment.

[0088] In the example of FIG. 14, not only the position and the width ofthe photoelectric conversion sections 104 of the photoelectricconverting elements adjacent to the gap 103 but also the position andthe width of photoelectric conversion sections 301 of photoelectricconverting elements adjacent to the photoelectric converting elementsthat are adjacent to the gap 103 are adjusted. The width of thephotoelectric conversion sections 301 is made equal to the width of thephotoelectric conversion sections 104, whereby the area of thephotoelectric conversion sections 104 and the area of the photoelectricconversion sections 301 are made equal in this example. However, thearea of the photoelectric conversion sections 104 and the area of thephotoelectric conversion sections 301 may be made equal by adjusting arelative height of the photoelectric conversion sections 301 withrespect to the height of the photoelectric conversion sections 104 or byadjusting a relative width and height of the photoelectric conversionsections 301 with respect to the width and the height of thephotoelectric conversion sections 104. That is, as long as the area ofthe photoelectric conversion sections 301 is made equal to the area ofthe photoelectric conversion sections 104, an adjusting part ofdimensions does not matter.

[0089] In addition, the positions of the photoelectric conversionsections 104 and the positions of the photoelectric conversion section301 are adjusted such that centroid positions 107 of the photoelectricconversion sections 104, centroid positions 302 of the photoelectricconversion sections 301 and centroid positions 106 of the photoelectricconversion sections 105 are arranged at equal intervals.

[0090] That is, in this embodiment, the positions and the size of thephotoelectric conversion sections 104 and the positions and the size ofthe photoelectric conversion sections 301 are adjusted such that thecentroid positions 106, 107 and 302 are arranged at equal intervals andthe area of the photoelectric conversion sections 104 and the area ofthe photoelectric conversion sections 301 are made equal.

[0091] In addition, in the case in which signals obtained from aplurality of photoelectric converting elements are collected to obtain aone-pixel signal, a one-pixel signal for the plural-pixel area 108 and aone-pixel signal for the plural-pixel area 303 are obtained as shown inFIG. 15. The plural-pixel area 303 is a plural-pixel area consisting oftwo photoelectric converting elements adjacent to the gap 103 and twophotoelectric converting elements adjacent to the two photoelectricconverting elements that are adjacent to the gap. By setting theplural-pixel area in this way, the position 110 of the one-pixel signalfor the plural-pixel area 108 and the position 112 of the one-pixelsignal for the plural-pixel area 303 are arranged at equal intervalsboth in the cases of the charge addition and the voltage addition.

[0092] A fourth embodiment is a configuration in which scanning circuits304 are arranged between the photoelectric conversion sections 301 andthe photoelectric conversion sections 104 in the configuration of thethird embodiment as shown in FIG. 16. Although the scanning circuit 304is a vertical scanning circuit in the plural-pixel area 10 (FIG. 3), itis a horizontal scanning circuit in the plural-pixel area 11 (FIG. 3).

[0093] According to this embodiment, scanning circuits are arranged inspaces between the narrowed photoelectric conversion sections 301 andphotoelectric conversion sections 104, whereby the scanning circuits canbe arranged in the image sensing element without breaking the conditionthat the pixel centroids are arranged at equal intervals, irrespectiveof whether a one-pixel signal is obtained from each photoelectricconverting element or one-pixel signals are obtained from a plurality ofphotoelectric elements.

[0094] A fifth embodiment is a configuration in which scanning circuits304 are arranged between the photoelectric conversion sections 301 andthe photoelectric conversion sections 104 in the configuration of thethird embodiment as shown in FIG. 17. Although the scanning circuit 304is a vertical scanning circuit in the plural-pixel area 10 (FIG. 3), itis a horizontal scanning circuit in the plural-pixel area 11 (FIG. 3).

[0095] According to this embodiment, scanning circuits are arranged inspaces between the narrowed photoelectric conversion sections 301 andphotoelectric conversion sections 104, whereby the scanning circuits canbe arranged in the image sensing element without breaking the conditionthat the pixel centroids are arranged at equal intervals, irrespectiveof whether a pixel signal is obtained from each photoelectric convertingelement or one-pixel signals are obtained from a plurality ofphotoelectric elements. In addition, pixels 104 opposing adjacent toeach other are added in the gap between the image sensing elements 101Aand 101B, whereby the distance between added pixel centroids 113 and theone-pixel centroid 302 of the other photoelectric converting element andthe distance between the one-pixel centroids 302 and 106 can be made tocoincide with each other.

[0096] A basic configuration of the fifth embodiment is as describedbelow.

[0097]FIG. 16 shows an enlarged view of the position denoted byreference numeral 10 in FIG. 3 of the image sensing apparatus accordingto this embodiment.

[0098] In the example of FIG. 16, not only the position and the width ofthe photoelectric conversion sections 104 of the photoelectricconverting elements adjacent to the gap 103 but also the position andthe width of photoelectric conversion sections 301 of photoelectricconverting elements adjacent to the photoelectric converting elementsthat are adjacent to the gap 103 are adjusted. The added centroids 113of the photoelectric converting elements 104 and the centroids 302 and106 of the other photoelectric converting elements are arranged at equalintervals by adjusting the relative positions of the photoelectricconversion sections 301 with respect to the photoelectric conversionsections 104.

[0099] In addition, the positions of the photoelectric conversionsections 104 and the positions of the photoelectric conversion section301 are adjusted such that added centroid positions 107 of thephotoelectric conversion sections 104, centroid positions 302 of thephotoelectric conversion sections 301 and centroid positions 106 of thephotoelectric conversion sections 105 are arranged at equal intervals.

[0100] That is, in this embodiment, the positions and the size of thephotoelectric conversion sections 104 and the positions and the size ofthe photoelectric conversion sections 301 are adjusted such that theadded centroid positions 113 of the pixels opposing each other throughthe gap, the centroids 302 of the adjacent photoelectric convertingelements and the centroids 106 of the other photoelectric convertingelements are arranged at equal intervals.

[0101] By setting the plural-pixel area 305 in the lamination gapsection in this way, the position 113 of the one-pixel signal for theplural-pixel area 305 and the centroid positions 302 and 106 for theone-pixels 301 and 105, respectively, are arranged at equal intervalsboth in the cases of the charge addition and the voltage addition,whereby distortion of an image is eliminated. In addition, since signalsof a plurality of photoelectric conversion sections of a plural-pixelarea are added, influence of offset for each image sensing element isalso reduced.

[0102] As described above, in this embodiment, processing is performedsuch that a one-pixel signal is obtained by adding signals of aplurality of photoelectric conversion sections within a plural-pixelarea, a one-pixel signal is obtained from each photoelectric conversionsection in the other areas, and an image is obtained by an imageprocessing circuit (not shown) using the one-pixel signal obtained byaddition and the one-pixel signal from each photoelectric section.

[0103] In the above-mentioned first to fifth embodiments, the examplesof adding signals in the state of analog signals are shown as an addingcircuit. However, signals may be added after being converted to digitalsignals by an analog/digital converting circuit.

[0104] As described above, according to the first to the fifthembodiments, pixel signals arranged at equal intervals can be obtainedin a border between image sensing elements not only in the case in whicha one-pixel signal is obtained from each photoelectric convertingelement but also in the case in which one-pixel signals are obtainedfrom a plurality of photoelectric converting elements in an imagesensing apparatus that is configured by tessellating a plurality ofimage sensing elements. Thus, an image obtained from the image sensingapparatus is never distorted even in borders between the image sensingelements.

[0105] In the arrangements shown in FIGS. 9, 12, 14, 15, 16 and 17, thephotoelectric conversion sections other than those 104, 105 and 301 arelight-shielded with a light shielding member (not shown) which is formedwith a metal layer such as aluminum layer or the like. In this case, aphotoelectric conversion section corresponds to an opening portion ofthe light shielding member. In the circuits shown in FIGS. 6, 7, 8, 10and 13, an addition circuit, a transfer switch, a reset switch, a pixelamplifier and the like other than the photoelectric conversion section(a photodiode) are arranged under a light shielding member, therebybeing shielded from light. In addition, the scanning circuit 304 andcommon processing circuit shown in FIGS. 16 and 17 are also arrangedunder a light shielding member, thereby being shielded from light.

[0106]FIG. 18 will now be described before describing sixth to twelfthembodiments.

[0107] The applicant has proposed an image sensing apparatus having animage sensing element as shown in FIG. 18 for the purpose of providing aseamless image using a high-performance image sensing element of aplurality of monocrystal silicon.

[0108] Referring to FIG. 18, reference numeral 2101 denotes aphotoelectric conversion section (photodiode) of each of a plurality ofphotoelectric converting elements provided in an image sensing element,2102 denotes a vertical shift register that is a type of a verticalscanning circuit, 2103 denotes a horizontal shift register that is atype of a horizontal scanning circuit, 2104 denotes a switch forming amultiplexer for alternately supplying a signal read out on a verticalreading line to a horizontal reading line, 2105 denotes an externalterminal (having a bump 2106) for supplying power and signal from theoutside or supplying a signal to the outside, and 2107 denotes aprotective circuit for protecting an image sensing element from a highvoltage and a high current from the outside.

[0109] In FIG. 18, centroids of the photoelectric conversion sectionsshown by “x” are not arranged at equal intervals. This is because thecentroids of the photoelectric conversion sections, the left sides ofwhich are eroded by the vertical shift register 2102, are moved to theright, centroids of the photoelectric conversion sections, the lowersides of which are eroded by the switch 2104, are moved upward, andcentroids of the photoelectric conversion section, the upper side ofwhich are eroded by the protective circuit 2107, are moved downward.

[0110] Thus, in view of the above-mentioned points, an image sensingapparatus, in which centroids of photoelectric conversion sections arearranged at equal intervals even if a scanning circuit is arranged in animage sensing area that is an effective pixel area of an image sensingelement, will be described in the following embodiments.

[0111]FIG. 19 shows a situation in which the unit block (unit forselecting and driving one row) 601 of the vertical shift register 501 isarranged inside a photoelectric conversion section 602 of a one-pixelarea (one cell). The vertical shift register is structured as a circuitthat is composed of the static-type shift register 604 and the transfergate 605 in order to produce a transfer signal ΦTX, a reset signal ΦRESand a row selection signal ΦSEL. These are driven by a signal from aclock signal line (not shown). A circuit configuration of a shiftregister is not limited to this, and an arbitrary circuit configurationmay be adopted according to various methods of driving such as pixeladdition and read-out with thinning out.

[0112] In the following embodiments, a common processing circuit means acircuit such as a final signal output amplifier, a serial/parallelconverting multiplexer, an amplifier or various gate circuits, whichcollectively processes a plurality of pixels in common. The commonprocessing circuit is functionally a circuit for outputting an imagesignal of each pixel read out on a vertical reading line to the outsidethrough a horizontal reading line and an amplifier.

[0113] On the other hand, an individual circuit means a circuit such asa photodiode, a transfer switch, a pixel selection switch or a pixeloutput amplification circuit, which processes one pixel only.

[0114]FIG. 20 shows a configuration (plan view) of an image sensingelement of the sixth embodiment.

[0115] In this embodiment, a vertical shift register 501B, a horizontalshift register 507B and a common processing circuit (including amultiplexer) are arranged in an effective pixel area of the imagesensing element.

[0116] Reference numeral 601A denotes circuits for one row amongvertical scanning circuits, 601B denotes circuits (unit blocks) for onecolumn among horizontal scanning circuits, and 601C denotes circuits(unit blocks) for one column among common processing circuits. Thecentroid of the photoelectric section 602 in which the circuit 601A isarranged in the center is identical with the centroid of thephotoelectric conversion section 602 in which the circuit 601A is notarranged. Similarly, the centroid of the photoelectric conversionsection 602 in which the circuit 601B is arranged in the center isidentical with the centroid of the photoelectric conversion section 602in which the circuit 601B is not arranged. The centroid of thephotoelectric conversion section 602 in which the circuit 601C isarranged in the center is identical with the centroid of thephotoelectric conversion section 602 in which the circuit 601C is notarranged. Moreover, the centroid of the photoelectric conversion section602 in which the circuit 601A and the circuit 601B are arrangedsymmetrically with respect to the central line of the photoelectricconversion section 602 is identical with centroid of the photoelectricconversion section 602 in which the circuit 601A and the circuit 601Bare not arranged. Similarly, the centroid of the photoelectricconversion section 602 in which the circuit 601A and the circuit 601Care arranged symmetrically with respect to the central line of thephotoelectric conversion section 602 is identical with centroid of thephotoelectric conversion section 602 in which the circuit 601A and thecircuit 601C are not arranged. On the other hand, when the circuits601A, 601B and 601C are not arranged, the centroids of the photoelectricconversion sections 602 are arranged at equal intervals. Therefore, thecentroids of the photoelectric conversion sections 602 are arranged atequal intervals even if the circuits 601A, 601B and 601C are arranged.

[0117] Further, a static-type shift register is used as a shift registerbeing an example of a scanning circuit. Various circuit configurationscan be applied to the shift register by designing. In this embodiment, ageneral example of a circuit is described. What is important is thepoint that the static shift register is used.

[0118] In this embodiment, since a shift register is arranged in aneffective pixel area, X-ray having penetrated a scintillator plate isdirectly irradiated on the shift register. X-ray is problematic becauseit damages an element or causes an error.

[0119] As an example of an error, there is a phenomenon in which chargesare accumulated on an interface between an insulating oxide film SiO₂and silicon and variation of a threshold value or increase of a leakcurrent is caused. In addition, as an example of a damage, there is adefect generated on a pn junction surface, which causes increase of aleak current.

[0120] As another example of an error, there is an error similar to anerror (soft error) due to an action of a hot electron known as a failurein an MOS type dynamic RAM.

[0121] Although a hot electron generated by an electric field tends tobe generated in a short channel structure in which an electric field ishigh, a hot electron generated by X-ray is generated regardless of itssize. Thus, an image sensing apparatus tends to be unstable when X-rayis irradiated on it regardless of its plane size.

[0122] A shift register used for driving pixels of an image sensingelement will now be described. A shift register circuit is used forsequentially transferring pulse signals.

[0123]FIGS. 21 and 22 show examples of a configuration of a static shiftregister circuit. This shift register circuit is disclosed in JapanesePatent Application Laid-open No. 9-223948. A first stage section of theshift register circuit consists of one inverter and two clockedinverters in the configuration of FIG. 21 and consists of threeinverters and two CMOS transfer gates in the configuration of FIG. 22.Here, clock signals CLK and /CLK (“/” indicates a negative logic) havingopposite phases are inputted in each of the two clocked inverters oreach of the two CMOS transfer gates. In addition, clock signals havingopposite phases are inputted in each of adjacent shift registercircuits.

[0124]FIG. 23 shows a view of an internal configuration of an inverter.

[0125]FIG. 24 shows a view of an internal configuration of a clockedinverter. The clocked inverter is composed of a p channel type inputtransistor Tr1, a p channel type clocked transistor Tr2, an n channeltype clocked transistor Tr3 and an n channel type input transistor Tr4,which are serially connected between a power supply and a ground. Anoutput is taken out from a connecting point of the transistor Tr2 andthe transistor Tr3.

[0126] As described above, the shift register circuit used in a drivingcircuit is usually driven in synchronous with a clock by two clocksignals having opposite phases.

[0127]FIG. 25 shows an example of a configuration of a dynamic-typeshift register circuit. Whereas a clocked inverter (or a transfer gateand an inverter) for feedback is provided in the static-type shiftregister, a transistor TR in which clocks are applied by a gate, and acapacitor C, are provided between inverters in the dynamic-type shiftregister, whereby the number of elements is reduced to realize low powerconsumption. This shift circuit is disclosed in Japanese PatentApplication Laid-open No. 5-218814. The dynamic-type shift registertheoretically performs operations for accumulating charges in thecapacitor to hold data.

[0128] In the dynamic-type shift register, if leakage exists in aninterface between a pn junction surface or an insulating layer andsilicon, the capacitor cannot hold charges and the dynamic-type shiftregister does not operate normally. When the dynamic-type shift registeris used in a place where X-ray is irradiated, it is susceptible todamages by the X-ray and does not operate due to increase of a leakcurrent, whereby a problem concerning reliability arises. In addition, anormal image cannot be obtained because of a failure due to a hotelectron caused by X-ray.

[0129] In contrast, theoretically, the static-type shift register isrelatively insusceptible to an influence of X-ray, thus it can be usedin a place where X-ray is directly irradiated as in this embodiment.Therefore, if the static-type shift register is used, an image sensingapparatus with fewer damages or errors caused by X-ray and improvedreliability can be realized.

[0130] In addition, as a scanning circuit, an n to 2^(n) decoder can beused rather than a shift register. Sequential scanning becomes possibleas in a shift register by connecting a counter output that sequentiallyincrements, to an input of the decoder. On the other hand, an image ofan arbitrary area by random scanning can be obtained by inputting anaddress of an area where an image is desired to be formed, into theinput of the decoder.

[0131] The above-mentioned configuration of the shift register isapplied to the above-mentioned first to fifth embodiments and theseventh to the twelfth embodiments to be described later.

[0132] This embodiment uses a CMOS sensor as an image sensing element,it is preferred in forming a large image sensing apparatus that consumesless power.

[0133] Further, it is for the purpose of accelerating operations of animage sensing element to provide a multiplexer in the image sensingelement.

[0134] In addition, a signal is taken out to the outside from an imagesensing element through an electrode pad, around which there is a largefloating capacity. Therefore, a transmission property of a signal can becompensated by providing the amplifier 508 in the front stage of theelectrode pad.

[0135] An image sensing apparatus of the seventh embodiment is the sameas the sixth embodiment in a basic configuration and is different fromthe sixth embodiment in a format of arranging a scanning circuit and acommon processing circuit.

[0136]FIG. 26 shows a configuration (plan view) of an image sensingelement of this embodiment.

[0137] Reference numeral 601D denotes circuits for one row of verticalscanning circuits, 601E denotes circuits for one column of horizontalscanning circuits and 601F denotes circiuts for one column of commonprocessing circuits. The centroid of the photoelectric section 602 inwhich the circuits 601D are arranged in the four corners is identicalwith the centroid of the photoelectric conversion section 602 in whichthe circuits 601D are not arranged. Similarly, the centroid of thephotoelectric conversion section 602 in which the circuits 601E arearranged in the four corners is identical with the centroid of thephotoelectric conversion section 602 in which the circuits 601E are notarranged. The centroid of the photoelectric conversion section 602 inwhich the circuits 601F are arranged in the four corners is identicalwith the centroid of the photoelectric conversion section 602 in whichthe circuits 601F are not arranged. Moreover, the centroid of thephotoelectric conversion section 602 in which the circuits 601D and thecircuits 601E are arranged in the four corners of the photoelectricconversion section 602 is identical with the centroid of thephotoelectric conversion section 602 in which the circuits 601D and thecircuits 601E are not arranged. Similarly, the centroid of thephotoelectric conversion section 602 in which the circuits 601D and thecircuits 601F are arranged in the four corners of the photoelectricconversion section 602 is identical with centroid of the photoelectricconversion section 602 in which the circuits 601D and the circuits 601Fare not arranged. On the other hand, when the circuits 601D, 601E and601F are not arranged, the centroids of the photoelectric conversionsections 602 are arranged at equal intervals. Therefore, the centroidsof the photoelectric conversion sections 602 are arranged at equalintervals even if the circuits 601D, 601E and 601F are arranged.

[0138] An image sensing apparatus of the eighth embodiment is the sameas the sixth embodiment in a basic configuration and is different fromthe sixth embodiment in a format of arranging a scanning circuit and acommon processing circuit.

[0139]FIG. 27 shows a configuration (plan view) of an image sensingelement of this embodiment.

[0140] Reference numeral 501B denotes a vertical scanning circuit, 507Bdenotes a horizontal scanning circuit, and 509 denotes a commonprocessing circuit. The centroid of the photoelectric section 602 inwhich the vertical scanning circuit 501B is arranged in the center isidentical with the centroid of the photoelectric conversion section 602in which the vertical scanning circuit 501B is not arranged. Similarly,the centroid of the photoelectric conversion section 602 in which thehorizontal scanning circuit 507B is arranged in the center is identicalwith the centroid of the photoelectric conversion section 602 in whichthe horizontal scanning circuit 507B is not arranged. The centroid ofthe photoelectric conversion section 602 in which the common processingcircuit 509 is arranged in the center is identical with the centroid ofthe photoelectric conversion section 602 in which the common processingcircuit 509 is not arranged. Moreover, the centroid of the photoelectricconversion section 602 in which the vertical scanning circuit 501B andthe horizontal scanning circuit 507B are arranged in the center isidentical with centroid of the photoelectric conversion section 602 inwhich the vertical scanning circuit 501B and the horizontal scanningcircuit 507B are not arranged. Similarly, the centroid of thephotoelectric conversion section 602 in which the vertical scanningcircuit 501B and the common processing circuit 509 are arranged in thecenter is identical with centroid of the photoelectric conversionsection 602 in which the vertical scanning circuit 501B and the commonprocessing circuit 509 are not arranged. On the other hand, when thevertical scanning circuit 501B, the horizontal scanning circuit 507B andthe common processing circuit 509 are not arranged, the centroids of thephotoelectric conversion sections 602 are arranged at equal intervals.Therefore, the centroids of the photoelectric conversion sections 602are arranged at equal intervals even if the vertical scanning circuit501B, the horizontal scanning circuit 507B and the common processingcircuit 509 are arranged.

[0141] Further, since scanning circuits and common processing circuitsare not divided in this embodiment, a power supply line can be arrangedon the scanning circuits and/or the common processing circuits forshielding X-ray. As a material of the power supply line, copper or thelike, which has high absorptance is used.

[0142] Scanning circuits and common processing circuits are arrangedinside a photoelectric conversion section such that the centroid of thephotoelectric conversion section does not move in the sixth to theeighth embodiments. On the other hand, in the ninth embodiment, a lightshielding section is arranged in such manner that it covers a part of aphotoelectric conversion section, and the light shielding section isarranged inside the photoelectric conversion section such that thecentroid of the photoelectric conversion section does not move. Inaddition, scanning circuits and common processing circuits are providedbelow the light shielding section. Further, the light shielding sectionconsists of, for example, a metal for wiring. In this embodiment, evenif circuits for each row or each column of the scanning circuits are notformed in an identical shape to each other, the movement of the centroidof the photoelectric conversion section can be prevented by devising thearrangement of the light shielding section. In addition, even ifcircuits for each column of the common processing circuit are not formedin an identical shape to each other, the movement of the centroid of thephotoelectric conversion section can be prevented by devising thearrangement of the light shielding section.

[0143]FIG. 28 shows a configuration (plan view) of an image sensingapparatus of the ninth embodiment.

[0144] Reference numeral 611A denotes a light shielding section forcovering circuits for one row of vertical scanning circuits, 611Bdenotes a light shielding section for covering circuits for one columnof horizontal scanning circuits, and 611C denotes a light shieldingsection for covering circuits for one column of common processingcircuits. In addition, reference numeral 611D denotes a light shieldingsection for covering circuits for one row of the vertical scanningcircuits and circuits for one column of the horizontal scanningcircuits, and 611E denotes a light shielding section for coveringcircuits for one row of the vertical scanning circuits and circuits forone column of the common processing circuits. The centroid of thephotoelectric conversion section 602 in which the light shieldingsection 611A is arranged in the center is identical with the centroid ofthe photoelectric conversion section 602 in which the light shieldingsection 611A is not arranged. Similarly, the centroids of thephotoelectric conversion sections 602 in which the light shieldingsections 611B, 611C, 611D and 611E are arranged in the center,respectively, are identical with the centroids of the photoelectricconversion section 602 in which the light shielding sections 611B, 611C,611D and 611E are not arranged. On the other hand, if the lightshielding sections 611A to 611E are not arranged, the centroids of thephotoelectric sections 602 are arranged at equal intervals. Therefore,even if the light shielding sections 611A to 611E are arranged, thecentroids of the photoelectric conversion sections 602 are arranged atequal intervals.

[0145] In the ninth embodiment, a light shielding section is arrangedonly in a photoelectric conversion section in which scanning circuitsand/or common processing circuits are arranged. In a tenth embodiment, alight shielding section is arranged either in a photoelectric conversionsection in which scanning circuits and/or common processing circuits arearranged or in a photoelectric conversion section in which scanningcircuits and common processing circuits are not arranged. That is, thelight shielding section is arranged in any photoelectric conversionsection.

[0146]FIG. 29 shows a configuration (plan view) of an image sensingelement of this embodiment.

[0147] Reference numeral 611F denotes light shielding sections, whichare arranged in all photoelectric conversion sections. Parts of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611A) cover circuits for onerow of vertical scanning circuits. In addition, another part of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611B) cover circuits for onecolumn of horizontal scanning circuits. Moreover, another part of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611C) cover circuits for onecolumn of common processing circuits. Moreover, another part of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611D) cover circuits for onerow of the vertical scanning circuit and circuits for one column of thehorizontal scanning circuits. Furthermore, another part of the lightshielding sections (e.g., the light shielding section which is in theposition of the light shielding section 611E) cover circuits for one rowof the vertical scanning circuits and circuits for one column of thecommon processing circuits. The centroid of the photoelectric conversionsection 602 in which the light shielding section 611F is arranged in thecenter is identical with the centroid of the photoelectric conversionsection 602 in which the light shielding section 611A is not arranged.On the other hand, when the light shielding sections 611F are notarranged, the centroids of the photoelectric conversion section 602 arearranged at equal intervals. Therefore, even if the light shieldingsections 611F are arranged, the centroids of the photoelectricconversion section 602 are arranged at equal intervals.

[0148] In the tenth embodiment, the light shielding section 611F isarranged in the center of the photoelectric conversion section 602 suchthat the centroid of the photoelectric conversion section 602 does notmove. However, it is not always necessary to dispose a light shieldingsection such that the centroid of the photoelectric conversion section602 does not move, as long as the condition that the centroids of thephotoelectric conversion sections 602 in which the light shieldingsections be arranged at equal intervals is satisfied and if the lightshielding sections are arranged in all the photoelectric conversionsections 602.

[0149]FIG. 30 shows a configuration (plan view) of an image sensingelement of an eleventh embodiment.

[0150] Reference numeral 611G denotes light shielding sections, whichare arranged in all photoelectric conversion sections. Parts of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611A) cover circuits for onerow of vertical scanning circuits. In addition, another part of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611B) cover circuits for onecolumn of horizontal scanning circuits. Moreover, another part of thelight shielding sections (e.g., the light shielding section which is inthe position of the light shielding section 611C) cover circuits for onecolumn of common processing circuits. Moreover, another part of thelight shielding sections (e.g., the light shielding section in theposition of the light shielding section 611D) cover circuits for one rowof the vertical scanning circuits and circuits for one column of thehorizontal scanning circuits. Furthermore, another part of the lightshielding sections (e.g., the light shielding section in the position ofthe light shielding section 611E) cover circuits for one row of thevertical scanning circuits and circuits for one column of the commonprocessing circuits.

[0151] In this embodiment, the light shielding section 611G is arrangedsuch that the centroid of the photoelectric conversion section 602moves. However, since the light shielding sections 611G are arranged inall the photoelectric conversion section 602, and moving directions andmoving amounts of the centroids of the photoelectric conversion sections602 in which the light shielding sections 611G are arranged are equal,the centroids of the photoelectric conversion sections 602 are arrangedat equal intervals even if the light shielding sections 611G areprovided.

[0152] As described above, according to the sixth to the eleventhembodiments, using an entire surface of an image sensing element as aneffective pixel area, and scanning circuits and common processingcircuits are arranged inside a photoelectric conversion section for eachpixel in the effective pixel area. In addition, using an entire surfaceof an image sensing element as an effective image sensing area, a lightshielding section is arranged inside a photoelectric conversion sectionfor each pixel in the effective pixel area, and scanning circuits andcommon processing circuits are arranged below it. Therefore, since imagesensing elements can be arranged such that a substantial gap is notgenerated between the image sensing elements, discontinuity or lack ofan image does not occur between the image sensing elements even if anentire circumference of a given image sensing element is surrounded byother image sensing elements to configure an image sensing apparatuswhich forms one image by five (in the case of a crucifix-shaped area) ornine (in the case of a rectangular area of 3/row×3/column) or more imagesensing elements.

[0153] In addition, it has become possible to arrange centroids ofphotoelectric conversion sections at equal intervals by carefullydevising an arrangement of scanning circuits, common processing circuitsand light shielding sections inside the photoelectric conversionsections. Therefore, it has become possible to avoid problems ofdistortion of images due to arrangement of centroids of photoelectricconversion sections at unequal intervals.

[0154]FIG. 31 shows a twelfth embodiment that is an example of anapplication of the image sensing apparatus of the first to the eleventhembodiments to an X-ray diagnosis system.

[0155] X-ray 6060 generated by an X-ray tube 6050 penetrates a chest6062 of a patient or an object 6061 and is incident on a radiation imagesensing apparatus 6040 provided with the scintillator 201, the FOP 202,the image sensing element 101 and the external processing substrate 204.The incident X-ray includes information of the inside of the body of thepatient 6061. The scintillator emits light in response to the incidenceof the X-ray, the light is photoelectrically converted by the imagesensing element, and electric information is obtained. This informationis digitally converted, subject to image processing by an imageprocessor 6070 and observed on a display 6080 in a control room.

[0156] In addition, this information can be transferred to a distantplace by transferring means such as telephone lines 6090, can beindicated on a display 6081 or saved in saving means such as an opticaldisk in a doctor's room in another place, and enables a doctor in thedistant place to make a diagnosis. In addition, the information can berecorded in a film 6110 by a film processor 6100.

[0157] As many apparently widely different embodiments of the presentinvention can be made without departing from the spirit and scopethereof, it is to be understood that the invention is not limited to thespecific embodiments thereof except as defined in the appended claims.

What is claimed is:
 1. An image sensing apparatus comprising: aplurality of image sensing elements each including a plurality ofphotoelectric conversion sections; and an adding circuit adapted to addsignals from said plurality of photoelectric conversion sections toobtain a one-pixel signal, wherein said adding circuit adds the signalssuch that the one-pixel signals obtained by the addition are arranged atequal intervals in an area extending over said plurality of imagesensing elements.
 2. An image sensing apparatus according to claim 1,wherein the centroids of said photoelectric conversion sections arearranged at equal intervals in the area extending over said plurality ofimage sensing elements.
 3. An image sensing apparatus according to claim1, wherein said adding circuit includes a voltage adding circuit adaptedto add the signals generated in said plurality of photoelectricconversion sections at a voltage level.
 4. An image sensing apparatusaccording to claim 3, wherein said voltage adding circuit is arranged soas to add signals generated in photoelectric conversion sections of oneimage sensing element.
 5. An image sensing apparatus according to claim3, wherein said voltage adding circuit is arranged so as to add signalsgenerated in photoelectric conversion sections in a plurality of imagesensing elements.
 6. An image sensing apparatus according to claim 1,wherein said adding circuit includes a charge adding circuit adapted toadd charge levels of the signals generated in said plurality ofphotoelectric conversion sections.
 7. An image sensing apparatusaccording to claim 6, wherein said charge adding circuit adds signalsgenerated in photoelectric conversion sections of one image sensingelement.
 8. An image sensing apparatus comprising: a plurality of imagesensing elements each including a plurality of photoelectric conversionsections; and an adding circuit adapted to add signals from saidplurality of photoelectric conversion sections to obtain a one-pixelsignal, wherein each photoelectric conversion section is arranged suchthat the one-pixel signals obtained by the addition is arranged at equalintervals in an area extending over said plurality of image sensingelements.
 9. An image sensing apparatus according to claim 8, whereinthe centroids of said photoelectric conversion sections are arranged atequal intervals in the area extending over said plurality of imagesensing elements.
 10. An image sensing apparatus according to claim 8,wherein said adding circuit includes a voltage adding circuit adapted toadd charge levels of the signals generated in said plurality ofphotoelectric conversion sections.
 11. An image sensing apparatusaccording to claim 10, wherein said voltage adding circuit is arrangedso as to add signals generated in photoelectric conversion sections ofone image sensing element.
 12. An image sensing element according toclaim 10, wherein said voltage adding circuit is arranged so as to addsignals generated in photoelectric conversion sections in a plurality ofimage sensing elements.
 13. An image sensing apparatus according toclaim 8, wherein said adding circuit includes a charge adding circuitadapted to add charge levels of the signals generated in said pluralityof photoelectric conversion sections.
 14. An image sensing apparatusaccording to claim 13, wherein said charge adding circuit adds signalsgenerated in photoelectric conversion sections of one image sensingelement.
 15. An image sensing apparatus comprising: a plurality of imagesensing areas each including a plurality of photoelectric conversionsections, wherein said plurality of photoelectric conversion sectionsincluded in each image sensing area include photoelectric conversionsections having different areas; an adding circuit adapted to addsignals from said plurality of photoelectric conversion sections toobtain a one-pixel signal, wherein said adding circuit adds theone-pixel signals such that the one-pixel signals obtained by theaddition are arranged at equal intervals in an area extending over saidplurality of image sensing areas.
 16. An image sensing apparatuscomprising: a plurality of image sensing areas each including aplurality of photoelectric conversion sections, wherein said pluralityof photoelectric conversion sections included in each image sensing areainclude photoelectric conversion sections having different areas; and anadding circuit adapted to add signals from said plurality ofphotoelectric conversion sections to obtain a one-pixel signal, whereineach photoelectric conversion section is arranged such that theone-pixel signals obtained by the addition are arranged at equalintervals in an area extending over said plurality of image sensingareas.
 17. An image sensing apparatus comprising: a plurality of imagesensing areas each including a plurality of photoelectric conversionsections; a plurality of output sections adapted to output a signal onan each image sensing area basis; and an image processing circuitadapted to perform a processing so as to obtain an image from a firstone-pixel signal obtained by adding signals from said plurality ofphotoelectric conversion sections extending over said plurality of imagesensing areas and a second one-pixel signal obtained from eachphotoelectric conversion section.
 18. An image sensing apparatusaccording to claim 17, wherein the first one-pixel signal and the secondone-pixel signal are arranged at equal intervals in an area extendingover said plurality of image sensing areas.
 19. An image sensingapparatus comprising: a plurality of image sensing areas each includinga plurality of photoelectric conversion sections; a plurality of outputsections adapted to output a signal on a each image sensing area basis;and an adding circuit adapted to, when signals from said plurality ofphotoelectric conversion sections are added to obtain a one-pixelsignal, add the signals from said plurality of photoelectric conversionsections extending over said plurality image sensing areas to obtainsaid one-pixel signal.
 20. An image sensing apparatus according to claim1, further comprising: a scintillator plate; a signal processing circuitadapted to process signals from said image sensing elements; and aradiation source adapted to generate radiation.
 21. An image sensingapparatus according to claim 8, further comprising: a scintillatorplate; a signal processing circuit adapted to process signals from saidimage sensing elements; and a radiation source adapted to generateradiation.
 22. An image sensing apparatus according to claim 17, furthercomprising: a scintillator plate; a signal processing circuit adapted toprocess signals from said image sensing areas; and a radiation sourceadapted to generate radiation.
 23. An image sensing apparatus accordingto claim 19, further comprising: a scintillator plate; a signalprocessing circuit adapted to process signals from said image sensingareas; and a radiation source adapted to generate radiation.
 24. Animage sensing apparatus comprising a plurality of image sensing areasadapted to sense an object image, wherein said object image is sensedover said plurality of image sensing areas and each image sensing areais provided with a plurality of photoelectric conversion sections,wherein scanning circuit is arranged inside part of said photoelectricconversion sections, and wherein centroids of said photoelectricconversion sections in which said scanning circuits are arranged andcentroids of said photoelectric conversion sections in which saidscanning circuits are not arranged are arranged at equal intervals. 25.An image sensing apparatus comprising a plurality of image sensing areaseach including a plurality of photoelectric conversion sections, whereinan object image is sensed over said plurality of image sensing areas andeach of said plurality of image sensing areas has a first area in whicha scanning circuit is arranged between photoelectric conversion sectionsand a second area in which said scanning circuit is not arranged betweensaid photoelectric conversion sections, and wherein centroids of saidphotoelectric conversion sections of said first area and centroids ofsaid photoelectric conversion sections of said second area are arrangedat equal intervals.
 26. An image sensing apparatus according to claim24, wherein said scanning circuit is provided with a shift register. 27.An image sensing apparatus according to claim 26, wherein said shiftregister is a static type.
 28. An image sensing apparatus according toclaim 24, wherein said scanning circuit is provided with a decoder. 29.An image sensing apparatus according to claim 24, wherein a power supplyline is arranged on said scanning circuit.
 30. An image sensingapparatus comprising a plurality of image sensing areas, wherein anobject image is sensed over said plurality of image sensing areas andeach image sensing area is provided with a plurality of photoelectricconversion sections, wherein a common processing circuit adapted toselectively output to the outside signals from a vertical output line towhich signals from said plurality of photoelectric conversion sectionsin a vertical direction are read out, via a horizontal output line arearranged inside said photoelectric conversion sections wherein andcentroids of said photoelectric conversion sections in which said commonprocessing circuits are arranged and centroids of said photoelectricconversion section in which said common processing circuits are notarranged are arranged at equal intervals.
 31. An image sensing apparatuscomprising a plurality of image sensing areas each including a pluralityof photoelectric conversion sections, wherein an object image is sensedover said plurality of image sensing areas and each of said plurality ofimage sensing areas has a first area in which a common processingcircuit adapted to selectively output to the outside signals from avertical output line to which signals from said plurality ofphotoelectric conversion sections in said vertical direction are readout, via a horizontal output line is arranged between said photoelectricconverting areas, and second area in which said common circuit is notarranged between said photoelectric conversion sections, and whereincentroids of said photoelectric conversion sections of said first areaand centroids of said photoelectric conversion sections of said secondarea are arranged at equal intervals.
 32. An image sensing apparatusaccording to claim 30, wherein said common circuit is provided with amultiplexer.
 33. An image sensing apparatus according to claim 30,wherein said common processing circuit is provided with an amplifieradapted to amplify signals transferred to said horizontal output line.34. An image sensing apparatus according to claim 30, wherein a powersupply line is arranged on said common processing circuit.
 35. An imagesensing apparatus comprising a plurality of image sensing areas, whereinan object image is sensed over said plurality of image sensing areas andeach image sensing area is provided with a plurality of photoelectricconversion sections, wherein light shielding region is arranged insidepart of said photoelectric conversion sections and wherein centroids ofsaid photoelectric conversion sections in which said light shieldingsections are arranged and centroids of said photoelectric conversionsections in which said light shielding sections are not arranged arearranged at equal intervals.
 36. An image sensing apparatus according toclaim 35, wherein a scanning circuit is arranged under said lightshielding region.
 37. An image sensing apparatus according to claim 36,wherein said scanning circuit is provided with a shift register.
 38. Animage sensing apparatus according to claim 37, wherein said shiftregister is a static type.
 39. An image sensing apparatus according toclaim 36, wherein said scanning circuit is provided with a decoder. 40.An image sensing apparatus according to claim 35, wherein a commonprocessing circuit adapted to selectively output to the outside signalsfrom a vertical output line to which signals from said plurality ofphotoelectric conversion sections in a vertical direction are read out,via a horizontal output line is arranged under said light shieldingregion.
 41. An image sensing apparatus according to claim 35, whereinsaid common processing circuit is provided with a multiplexer.
 42. Animage sensing apparatus according to claim 35, wherein said commonprocessing circuit is provided with an amplifier adapted to amplify thesignals transferred to said horizontal output line.
 43. An image sensingapparatus comprising a plurality of image sensing areas, wherein anobject image is sensed over said plurality of image sensing areas andeach image sensing area is provided with a plurality of photoelectricconversion sections, wherein light shielding regions are arranged insidesaid plurality of photoelectric conversion sections, and whereincentroids of said photoelectric conversion sections in which said lightshielding regions are arranged are arranged at equal intervals.
 44. Animage sensing apparatus according to claim 43, wherein a scanningcircuit is arranged under said light shielding regions.
 45. An imagesensing apparatus according to claim 43, wherein said scanning circuitis provided with a shift register.
 46. An image sensing apparatusaccording to claim 45, wherein said shift register is a static type. 47.An image sensing apparatus according to claim 44, wherein said scanningcircuit is provided with a decoder.
 48. An image sensing apparatusaccording to claim 43, wherein a common processing circuit adapted toselectively output to the outside signals from a vertical output line towhich signals from said plurality of photoelectric conversion sectionsin a vertical direction are read out, via a horizontal output line isarranged under said light shielding regions.
 49. An image sensingapparatus according to claim 48, wherein said common processing circuitis provided with a noise eliminating circuit.
 50. An image sensingapparatus according to claim 48, wherein said common processing circuitis provided with an A/D converter.
 51. An image sensing apparatusaccording to claim 48, wherein said common processing circuit isprovided with a multiplexer.
 52. An image sensing apparatus according toclaim 48, wherein said common processing circuit is provided with anamplifier adapted to amplify signals transferred to said horizontaloutput line.
 53. An image sensing apparatus comprising a plurality ofimage sensing areas each including a plurality of photoelectricconversion sections, wherein an object image is sensed over a pluralityof image sensing areas and each of said plurality of image sensing areashas a first area in which a scanning circuit and/or a common processingcircuit adapted to selectively output to the outside signals from avertical output line to which signals from said plurality ofphotoelectric conversion sections in the vertical direction are readout, to a horizontal output line are arranged between said photoelectricconversion sections, and a second area in which said scanning circuitand said common circuit are not arranged between said photoelectricconversion sections, and wherein light shielding means is arranged suchthat centroids of said photoelectric conversion sections of said firstarea and centroids of said photoelectric conversion sections of saidsecond area are arranged at equal intervals.
 54. An image sensingapparatus according to claim 25, further comprising: a scintillatorplate; a signal processing circuit adapted to process signals from saidimage sensing areas; and a radiation source adapted to generateradiation.
 55. An image sensing apparatus according to claim 31, furthercomprising: a scintillator plate; a signal processing circuit adapted toprocess signals from said image sensing areas; and a radiation sourceadapted to generate radiation.
 56. An image sensing apparatus accordingto claim 35, further comprising: a scintillator plate; a signalprocessing circuit adapted to process signals from said image sensingareas; and a radiation source adapted to generate radiation.
 57. Animage sensing apparatus according to claim 43, further comprising: ascintillator plate; a signal processing circuit adapted to processsignals from said image sensing areas; and a radiation source adapted togenerate radiation.
 58. An image sensing apparatus according to claim53, further comprising: a scintillator plate; a signal processingcircuit adapted to process signals from said image sensing areas; and aradiation source adapted to generate radiation.